Product outline

The PS sensor is an ultra-precision displacement sensor with high stability and high resolution, applying our unique capacitance technology. It has earned a good reputation as a displacement sensor with great versatility and price, being used for measuring various parameters such as displacement, vibration, shape, and position.
Also, considering global environment, those products are Pb-free and conforms to RoHS2 Directive.
It is used both as a versatile high-performance tool for R&D and as a built-in component for semiconductor and electric devices.

Please note in advance that there are cases in which we are unable to sell this product due to Regulations for Export Trade Control in Japan.

Applications

Features

This is a single channel amplifier with BNC analog output, NEAR/FAR LED display, and zeroing function, operating with DC 24 V or AC 100 V power supply. This compact and multifunctional device can be used for various purposes such as R&D and integration to system and/or devices.

A wide variety of product lineup with standard measuring range from 30 μm to 10000 μm.
The sensitivity of the sensor is not affected as far as target objects are made of conductor material.
Free from the influence of surface roughness
High linearity : ±0.05% or less
Low noise : 0.002%/FS(rms) or less

Examples of custom-ordered probes

We can customize the shape for you! Please feel free to contact us anytime.

Principle of measurement

As shown in the figure below, the principle of parallel plate capacitor is applied to the PS sensor. Suppose the electrostatic capacitance between the center electrode and the target is “C”, the inductivity and distance between probe and the target are “ε” and “g,” and center electrode surface area is “A”, then, electrostatic capacitance can be calculated by the following formula:

In addition, by using AC constant current power supply as shown in the figure, the output voltage, calculated by the following formula, will be relative to the gap between sensor and the target object:

To achieve high linearity, parallel electric field is obtained at the center of electrode by equalizing the electric potential level of guard electrode and the center electrode.

Specifications

■ Specification of standard cylindrical probe

To make the sensor probe small, no electric circuit is built into the sensor probe. Special probes can be made to order as well (e.g. sensor probes resistant to vacuum condition).

Model	△X□□-30	△X□□-50	△X□□-100
Outer diameter	4 mm
Target minimum diameter	4 mm
Offset	10 μm
Range	30 μm	50 μm	100 μm
Resolution (PS-IA)	0.6 nm rms	1 nm rms	2 nm rms
Linearity	±0.05%
Probe length	5 mm(Custom-order product), 10 mm, 30 mm
Cable length	2 m(Standard)

Model	△Y□□-50	△Y□□-100	△Y□□-250	△Y□□-500
Outer diameter	6 mm
Target minimum diameter	6 mm
Offset	10 μm		25 μm	50 μm
Range	50 μm	100 μm	250 μm	500 μm
Resolution (PS-IA)	1 nm rms	2 nm rms	5 nm rms	15 nm rms Specification changed.
Linearity	±0.05%			±0.1%
Probe length	5 mm(Custom-order product), 10 mm, 30 mm
Cable length	2 m(Standard)

Model	△Z□□-500	△Z□□-1000	△T□□-3000	△T□□-5000
Outer diameter	12 mm		30 mm
Target minimum diameter	11 mm		28 mm
Offset	50 μm	100 μm	300 μm	500 μm
Range	500 μm	1000 μm	3000 μm	5000 μm
Resolution (PS-IA)	10 nm rms	20 nm rms	60 nm rms	120 nm rms Specification changed.
Linearity	±0.05%	±0.1%	±0.1% Specification changed.	±0.3% Specification changed.
Probe length	10 mm, 30 mm		15 mm, 30 mm
Cable length	2 m(Standard)

“△” = cable type, “□□” = probe length (mm)

■ Specification of standard square flange type probe

Model	FY1506-30	FY1506-50	FY1506-100	FY1506-250
Outer diameter	5 mm
Target minimum diameter	4.4 mm
Offset	15 μm	15 μm	15 μm	25 μm
Range	30 μm	50 μm	100 μm	250 μm
Resolution (PS-IA)	0.6 nm rms	1 nm rms	2 nm rms	5 nm rms
Linearity	±0.05%
Cable length	2 m(Standard)

Model	FE1506-100	FE1506-250	FE1506-500	FE1506-750
Outer diameter	7 mm
Target minimum diameter	6.2 mm
Offset	20 μm	25 μm	50 μm	75 μm
Range	100 μm	250 μm	500 μm	750 μm
Resolution (PS-IA)	2 nm rms	5 nm rms	15 nm rms	30 nm rms
Linearity	±0.05%			±0.1%
Cable length	2 m(Standard)

Model	FZ2006-500	FZ2006-750	FZ2006-1000	FZ2006-1500
Outer diameter	11 mm
Target minimum diameter	10.4 mm
Offset	50 μm	75 μm	100 μm	150 μm
Range	500 μm	750 μm	1000 μm	1500 μm
Resolution (PS-IA)	10 nm rms	15 nm rms	35 nm rms	60 nm rms
Linearity	±0.05%			±0.1%
Cable length	2 m(Standard)

Model	FK4006-500	FK4006-1000	FN4006-1000	FN4006-2000
Outer diameter	15 mm		19 mm
Target minimum diameter	15 mm		18 mm
Offset	50 μm	100 μm	100 μm	200 μm
Range	500 μm	1000 μm	1000 μm	2000 μm
Resolution (PS-IA)	10 nm rms	20 nm rms	20 nm rms	40 nm rms
Linearity	±0.05%
Cable length	2 m(Standard)

Model	FT4006-3000	FT4006-5000	FU5006-5000	FU5006 -10000
Outer diameter	29 mm		39 mm
Target minimum diameter	28 mm		38 mm
Offset	300 μm	500 μm	500 μm	1000 μm
Range	3000 μm	5000 μm	5000 μm	10000 μm
Resolution (PS-IA)	60 nm rms	120 nm rms	100 nm rms	300 nm rms
Linearity	±0.1%	±0.3%	±0.1%	±1.0%
Cable length	2 m(Standard)

■ Amplifier specifications

The PS-IA is equipped with various features like one-touch zero reset function, NEAR/FAR LED display, and multichannel operability, and it can be used for wide variety of applications.

Model	PS-IA	PS-IA(B)(Option)
Standard range of voltage output	0 to 10 V	-5 to +5 V
Output terminal	BNC connector
Frequency characteristic (≧-3 dB)	DC to 1 kHz
Operating temperature range	+10 to +40℃
Operating voltage	AC 100 to 240 V(±10%) (Free power supply 50/60 Hz) DC 24 V 0.5 A (Please specify the type of input when ordering）
Dimensions	110W×30H×162D mm
Weight	360 g (main body)

Please note that there are possibilities of individual differences in a color tone on display devices such as LEDs, fluorescent display tubes and LCDs due to manufacturing process or production lots.