Product outline

The PS sensor is an ultra-precision displacement sensor with high stability and high resolution, applying our unique capacitance technology. It has earned a good reputation as a displacement sensor with great versatility and price, being used for measuring various parameters such as displacement, vibration, shape, and position.
Also, considering global environment, those products are Pb-free and conforms to RoHS Directive.
It is used both as a versatile high-performance tool for R&D and as a built-in component for semiconductor and electric devices.


Various shapes and types


We can customize the shape for you! Please feel free to contact us anytime.

Features

This is a single channel amplifier with BNC analog output, NEAR/FAR LED display, and zeroing function, operating with DC24V or AC100V power supply. This compact and multifunctional device can be used for various purposes such as R&D and integration to system and/or devices.

  • A wide variety of product lineup with standard measuring range from 30μm to 1000μm.
  • The sensitivity of the sensor is not affected as far as target objects are made of conductor material.
  • Free from the influence of surface roughness
  • High linearity : ±0.05% or less
  • Low noise : 0.002%/FS(rms) or less
Applications

Principle of measurement

As shown in the figure below, the principle of parallel plate capacitor is applied to the PS sensor. Suppose the electrostatic capacitance between the center electrode and the target is “C”, the inductivity and distance between probe and the target are “ε” and “g,” and center electrode surface area is “A”, then, electrostatic capacitance can be calculated by the following formula:

In addition, by using AC constant current power supply as shown in the figure, the output voltage, calculated by the following formula, will be relative to the gap between sensor and the target object:

To achieve high linearity, parallel electric field is obtained at the center of electrode by equalizing the electric potential level of guard electrode and the center electrode.

Specifications

The PS-I is equipped with various features like one-touch zero reset function, NEAR/FAR LED display, and multichannel operability, and it can be used for wide variety of applications.

Model PS-IA
Standard range of voltage output 0 to 10V
Output terminal BNC connector
Frequency characteristic DC to 1kHz
Operating temperature range 10 to 40℃
Operating voltage DC24V or AC100V
Dimensions 110W×30H×162Dmm
Weight 355g (main body)
 

To make the sensor probe small, no electric circuit is built into the sensor probe. Special probes can be made to order as well (e.g. sensor probes resistant to vacuum condition).

Model Outer diameter (mm) Offset (μm) Range (μm) Resolution (nmrms) Linearity (%) Probe length (mm) Cable length (m)
△X□□-30 4 10 30 0.6 ±0.05

5

10

30

2 (standard)

△X□□-50 10 50 1
△X□□-100 10 100 2
△Y□□-50 6 10 50 1
△Y□□-100 10 100 2
△Y□□-250 25 250 5
△Y□□-500 50 500 10 ±0.1
△Z□□-500 12 50 500 10 ±0.05

10

30

△Z□□-1000 100 1000 20 ±0.1

“△” = cable type, “□□” = probe length (mm)